Phase-shift lithography for sub-wavelength patterns of varying aspect ratios - ScienceDirect
2. Advanced Lithography. (a) In a phase shift mask, a | Chegg.com
Complex two dimensional pattern lithography using chromeless phase lithography (CPL)
IDF 2004 Russia: 65nm Process Technology – Nearest Future of Intel Semiconductor Technologies
File:Alternating Phase Shift Mask.svg - Wikimedia Commons
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New Graph Bipartizations for Double-Exposure, Bright Field Alternating Phase -Shift Mask Layout Andrew B. Kahng (UCSD) Shailesh Vaya (UCLA) Alex Zelikovsky. - ppt download
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Required optical characteristics of materials for phase-shifting masks
2.4.2 Phase-Shifting Masks
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PHASE SHIFT MASK in Japanese Translation
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PDF] Thin Films for Phase-shift Masks | Semantic Scholar
Phase-shifting masks for microlithography: automated design and mask requirements
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File:Phase Shift Mask (4 types) N.PNG - Wikimedia Commons
Phase Shifting Mask, Photoresist - Integrated Circuit Fabrication
Phase-Shift Masks
Lithography using alternating phase shift mask – Lumerical Support
Imaging performance of attenuated phase-shift mask using coherent scattering microscope
Phase-shift mask - Wikipedia
Phase-Shift Masks
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Required optical characteristics of materials for phase-shifting masks. | Semantic Scholar
Attenuated phase-shifting masks of chromium aluminum oxide
