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Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes
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Negative-tone molecular glass photoresist for high-resolution electron beam lithography | Royal Society Open Science
![Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes](https://www.spiedigitallibrary.org/ContentImages/Journals/JMMMGF/9/4/043007/WebImages/043007_1_15.jpg)
Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes
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US9057960B2 - Resist performance for the negative tone develop organic development process - Google Patents
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3: Lithographic patterning of positive and negative tone resists (Dark... | Download Scientific Diagram
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PSCAR Demo with Metal Containing Positive Tone Resist (150 nm HP LS by... | Download Scientific Diagram
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